Wet Etching of Quartz and Manufacturing Process of Resonator
Miniaturization and high-frequency quartz resonators are being developed,with increasingly smaller si-zes.Therefore,it is very important to develop a low-cost precision manufacturing process for quartz resonators.Etching experiments on quartz wafers were conducted to determine the optimal process conditions for precise manu-facturing of rectangular resonators.The effects of temperature on the integrity of the metal protective layer and of etching time on the surface roughness of quartz were studied.The corrosion rate was stable and moderate,which was conducive to the precise manufacturing of the resonator.The process flow of the quartz resonator was designed to obtain an ultra-thin rectangular AT-cut high-frequency quartz resonator with good quality.The causes of the error were analyzed,and a set of wet etching process with good precision was summarized.It is expected that the thick-ness of the rectangular resonator will be reduced to 10 μm or less using low-cost means.
NETL
NSTL
万方数据
