基于位移放大的压电致动器设计与仿真
Design and Simulation of Piezoelectric Actuator Based on Displacement Amplification
王登攀 1向路 1王露 1王浩 1代里程2
作者信息
- 1. 中国电科芯片技术研究院,重庆 401332;国知创芯(重庆)科技有限公司,重庆 401332;中国电子科技集团公司第二十六研究所,重庆 400060
- 2. 中国电科芯片技术研究院,重庆 401332;国知创芯(重庆)科技有限公司,重庆 401332
- 折叠
摘要
压电叠堆致动器广泛用于驱动智能变形装置,由于压电叠堆输出位移小,需要放大结构增大位移输出.设计了一种椭圆形位移放大结构,分析了椭圆长轴、壳体厚度、X方向位移和压电叠堆宽度等结构参数对Y方向的位移输出、应力强度和放大倍数等性能的影响规律,优化了结构参数,并制作了样品.测试数据表明,位移放大结构实现了5.3倍以上的位移放大;分析了放大结构在高频电压驱动下的瞬态响应,模拟了驱动信号频率对位移输出的影响,结果表明,在周期0.01 s的交变电压驱动下,结构的位移输出未出现失真.
Abstract
Piezoelectric stack actuators are widely used for driving intelligent deformation devices.Piezoelectric stacks have small displacement outputs,which can be increased using amplification structures.To this end,an ellip-tical displacement amplification structure was designed in this study,and the effect of structural parameters on the performance of displacement amplification structure was analyzed.The structural parameters include the major axis of the ellipse,thickness of the shell,displacement in the X direction,and width of the piezoelectric stack.The per-formance factors include displacement output,stress intensity,and amplification factor in the Y direction.The sam-ples were fabricated based on the optimization results,and an amplification factor of approximately 5.3 was a-chieved.The transient response of the amplification structure driven by the high-frequency voltage was analyzed,and the influence of the frequency of driving signal on the displacement output was simulated.The results showed that the displacement output of the structure did not exhibit distortion driven by a alternating voltage with a period of 0.01 s.
关键词
压电致动器/位移放大结构/高频驱动Key words
piezoelectric actuator/displacement amplification structure/high-frequency driving引用本文复制引用
出版年
2024
NETL
NSTL
万方数据