压电复合薄膜的SAW器件杂波抑制及仿真方法
Spurious Wave Suppression and its Simulation for Surface Acoustic Wave Devices with Piezoelectric Composite Film
王吉芳 1陈平静 1曹稚颖 1潘虹芝 1董加和 1肖强 2吴浩东 3陈正林 2马晋毅2
作者信息
- 1. 中国电子科技集团公司 第二十六研究所,重庆 400060
- 2. 中国电子科技集团公司 第二十六研究所,重庆 400060;模拟集成电路国家重点实验室,重庆 400060
- 3. 南京大学 物理学院声学研究所,江苏 南京 210093
- 折叠
摘要
针对任意复杂膜系结构压电复合薄膜声表面波(SAW)器件横向杂波抑制及精确快速仿真方法,从数学上严格分析推导了有限长结构分层级联理论和色散2D-COM模型,可精确快速地计算压电复合薄膜SAW器件传播方向及孔径方向结构对杂波模式的影响,并通过色散2D-COM模型对SAW器件杂波抑制进行综合分析.通过对41° Y-X LiNbO3/SiO2/Si_poly/Si(111)复合衬底SAW谐振器的优化设计与研制,结果表明,设计优化结果与实验结果吻合较好,验证了该方法的有效性和可行性.
Abstract
To achieve spurious wave suppression and its simulation for piezoelectric surface acoustic wave(SAW)devices with arbitrary piezoelectric complex film structure,this study derived the equation of hierarchical cascade theory and a dispersion 2D-COM model of SAWs with a finite-length structure on the basis of rigorous mathematical analysis.The proposed approach can accurately and quickly calculate the influence of the propagation and aperture direction of the SAW device.The dispersion 2D-COM model facilitates the analysis of the suppression of spurious waves in SAW devices.Experimental results obtained from the design and implementation of the SAW filter with a 41°Y-X LiNbO3/SiO2/Si_poly/Si(111)structure were in good agreement with the simulation results,verifying the effectiveness and feasibility of the method.
关键词
压电复合薄膜/SAW器件/杂波抑制/分层级联/2D-COM模型Key words
piezoelectric complex film/SAW filters/spurious wave suppression/hierarchical cascade/2D-COM model引用本文复制引用
出版年
2024
NETL
NSTL
万方数据