基于声子晶体的兰姆波谐振器品质因数改善机制研究
Enhancement Mechanism of Quality Factor in Lamb Wave Resonators by Phononic Crystals
聂时进 1孟光 1郑凯 2黄栋 2刘钢3
作者信息
- 1. 上海交通大学 机械与动力工程学院,上海 200240
- 2. 成都智远先进制造技术研究院有限公司,四川 成都 610511
- 3. 成都智远先进制造技术研究院有限公司,四川 成都 610511;上海工程技术大学 机械与汽车工程学院,上海 201620
- 折叠
摘要
针对兰姆波谐振器谐振频率在超过6 GHz时传输损耗高的问题,提出了一种基于具有明显带隙的声子晶体(PnC)阵列的锚杆,能有效提高薄膜铌酸锂兰姆波谐振器(LWR)的品质因数(Q),从而降低兰姆波滤波器的插入损耗.通过构建PnC结构有限元仿真模型研究了PnC结构的色散关系,采用PnC延迟线模型设计,研究了PnC阵列的传输特性,并通过建立谐振器性能的对比分析.结果表明,在谐振频率稳定的条件下,与传统均匀梁锚杆谐振器相比,PnC阵列锚杆谐振器的Q值提升了5倍.
Abstract
To address the high transmission loss of Lamb wave resonators at frequencies exceeding 6 GHz,this paper introduces an anchoring structure based on phononic crystal(PnC)arrays with distinct band gaps.This design effectively enhances the quality factor(Q)of lithium niobate Lamb wave resonators(LWRs),thereby reducing the insertion loss of Lamb wave filters.By constructing a finite element simulation model of the PnC structure,we ana-lyzed the dispersion relationship of the PnC structure.Utilizing a PnC delay line model,we investigated the trans-mission characteristics of the PnC array.Through a comparative analysis of resonator performance,this study con-firms that under stable resonance frequency conditions,the Q value of the resonator using PnC array anchors is in-creased by a factor of five compared to traditional uniform beam anchor resonators.
关键词
锚杆损耗/微机电系统(MEMS)谐振器/声子晶体/品质因数/兰姆波Key words
anchor loss/MEMS resonator/phononic crystal/quality factor/Lamb wave引用本文复制引用
出版年
2024
NETL
NSTL
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