The output of quartz crystal microbalance(QCM)sensors is in the form of frequency signals.These sensors offer advantages such as low cost,fast response,and high sensitivity.This study utilized porous α-Al2O3,a moisture-sensitive material,to enhance the humidity detection sensitivity of QCM sensors.Simulations were per-formed using COMSOL,by applying the QCM sensing principle,to investigate the influence of various structural dimensions on the sensor's resonant frequency,quality factor,and admittance,while optimizing its geometric pa-rameters.Subsequently,the sensitivity and dynamic characteristics of the sensor were examined over a specific hu-midity range.The experimental findings demonstrate the remarkable humidity discrimination capability of the sen-sor,with a maximum frequency response of 13 kHz,sensitivity of 155 Hz/(%RH),and response and recovery times of 20 s and 8 s,respectively.These results demonstrate the reliability and accuracy of the QCM sensor,utili-zing porous α-Al2O3 as the moisture-sensitive material,in humidity detection.
quartz crystal microbalance(QCM)α-Al2O3humidity sensorfinite element simulationquality factorconductivity
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