基于多孔氧化铝的高品质因数QCM湿度传感器的研究
High-Quality-Factor Quartz Crystal Microbalance Humidity Sensor Utilizing Porous Aluminum Oxide
潘宇 1蒋书波 1陈惠1
作者信息
- 1. 南京工业大学 电气工程与控制科学学院,江苏 南京 211816
- 折叠
摘要
石英晶体微天平(QCM)传感器以频率形式输出信号,具有成本低、响应快、灵敏度高等优点,因而使用多孔α-Al2O3 作为湿敏材料来提高QCM传感器对湿度的检测灵敏度.基于QCM传感原理,通过COMSOL软件研究不同结构尺寸对传感器谐振频率、品质因数、导纳的影响,优化传感器的几何参数.探究传感器在一定湿度范围内的灵敏度和动态特性,实验结果表明,该传感器具有显著的湿度辨别能力,最大频率响应可达到13 kHz,灵敏度为155 Hz/(%RH),响应、恢复时间分别为20 s和8 s.因此,使用多孔α-Al2O3 作为湿敏材料的QCM传感器在湿度检测方面具有一定的可靠性和准确性.
Abstract
The output of quartz crystal microbalance(QCM)sensors is in the form of frequency signals.These sensors offer advantages such as low cost,fast response,and high sensitivity.This study utilized porous α-Al2O3,a moisture-sensitive material,to enhance the humidity detection sensitivity of QCM sensors.Simulations were per-formed using COMSOL,by applying the QCM sensing principle,to investigate the influence of various structural dimensions on the sensor's resonant frequency,quality factor,and admittance,while optimizing its geometric pa-rameters.Subsequently,the sensitivity and dynamic characteristics of the sensor were examined over a specific hu-midity range.The experimental findings demonstrate the remarkable humidity discrimination capability of the sen-sor,with a maximum frequency response of 13 kHz,sensitivity of 155 Hz/(%RH),and response and recovery times of 20 s and 8 s,respectively.These results demonstrate the reliability and accuracy of the QCM sensor,utili-zing porous α-Al2O3 as the moisture-sensitive material,in humidity detection.
关键词
石英晶体微天平(QCM)/α-Al2O3/湿度传感器/有限元仿真/品质因数/导纳Key words
quartz crystal microbalance(QCM)/α-Al2O3/humidity sensor/finite element simulation/quality factor/conductivity引用本文复制引用
出版年
2024
NETL
NSTL
万方数据