Design of a High-Density Piezoelectric Deformable Mirror Driving Power Supply
Piezoelectric deformable mirror is used as an actuator for adaptive optics system.In this study,a no-vel piezoelectric ceramic driving power supply is designed for high-precision and highly dynamic application of piezo-electric deformable mirror.The design adopts the linear correction network to ensure the stability of the amplifica-tion circuit.Furthermore,the reasons that affect the output accuracy and nonlinear distortion are analyzed.The ex-perimental results show that when driving a capacitive load of 0.33 μF,the drive power supply exhibits a large sig-nal bandwidth of up to 3 kHz,rise time of the step response greater than 80 μs,fall time greater than 130 μs,and output linearity of 99.6%.
piezoelectric ceramicsdriving power supplypiezoelectric deformation mirrorphase compensa-tioncapacitive loads
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