一种高密度压电变形镜驱动电源的设计
Design of a High-Density Piezoelectric Deformable Mirror Driving Power Supply
徐兴 1邵蒙 2李洪文2
作者信息
- 1. 中国科学院 长春光学精密机械与物理研究所,吉林 长春 130033;中国科学院大学,北京 100049
- 2. 中国科学院 长春光学精密机械与物理研究所,吉林 长春 130033
- 折叠
摘要
压电变形镜是自适应光学系统的执行机构.针对压电变形镜高精度、高动态应用的问题,设计了一款新型的压电陶瓷驱动电源,同时采取线性校正网络确保了放大电路的稳定性,并对影响输出精确度及非线性失真的原因进行了分析.实验结果表明,当驱动容性负载为0.33 μF时,该驱动电源的大信号带宽可达3 kHz,阶跃响应的上升时间优于80 μs,下降时间优于130 μs,输出线性度为99.6%.
Abstract
Piezoelectric deformable mirror is used as an actuator for adaptive optics system.In this study,a no-vel piezoelectric ceramic driving power supply is designed for high-precision and highly dynamic application of piezo-electric deformable mirror.The design adopts the linear correction network to ensure the stability of the amplifica-tion circuit.Furthermore,the reasons that affect the output accuracy and nonlinear distortion are analyzed.The ex-perimental results show that when driving a capacitive load of 0.33 μF,the drive power supply exhibits a large sig-nal bandwidth of up to 3 kHz,rise time of the step response greater than 80 μs,fall time greater than 130 μs,and output linearity of 99.6%.
关键词
压电陶瓷/驱动电源/压电变形镜/相位补偿/容性负载Key words
piezoelectric ceramics/driving power supply/piezoelectric deformation mirror/phase compensa-tion/capacitive loads引用本文复制引用
基金项目
天文联合基金资助项目(U2031126)
吉林省科技发展计划基金资助项目(20230203113SF)
出版年
2024
NETL
NSTL
万方数据