基于COM-MBVD混合模型的多模态声学响应研究与仿真
Research and Simulation of Multi-Modal Acoustic Response Based on COM-MBVD Hybrid Modeling
周艺蒙 1陈抒键 2蒋冠臻 2范维 2魏子杰 2李沛然 2帅垚 3吴传贵 3罗文博 3潘忻强 3张万里3
作者信息
- 1. 重庆邮电大学 光电工程学院,重庆 400065;电子科技大学 重庆微电子产业技术研究院,重庆 401332
- 2. 电子科技大学 电子科学与工程学院,四川 成都 611731
- 3. 电子科技大学 重庆微电子产业技术研究院,重庆 401332;电子科技大学 电子科学与工程学院,四川 成都 611731
- 折叠
摘要
耦合模(COM)模型广泛应用于声表面波(SAW)滤波器设计中,传统的单模COM模型不能拟合到远端的高阶水平剪切波、西沙瓦波等杂散模态.从单模COM模型出发,结合类似于 MBVD等效电路的谐振支路,实现COM-MBVD模型拟合多模态声学响应.并基于此模型搭建8阶梯形结构电路进行优化仿真.最终设计出中心频率为1 590 MHz,通带插入损耗小于1.6 dB,带内波动为1 dB,带宽为80 MHz(相对带宽为5%)的声表面波(SAW)滤波器.实际测试数据与仿真数据相符,验证了该设计方法的可行性.
Abstract
The coupling-of-modes(COM)model is extensively used in the design of surface acoustic wave(SAW)filters.However,the conventional single-mode COM model is insufficient for accounting for spurious modes,such as higher-order horizontal shear waves and Sezawa waves at the far end.In this study,we first used the single-mode COM model and integrated it with a resonant branch similar to the MBVD equivalent circuit to es-tablish the COM-MBVD model for accommodating the multi-modal acoustic response.Subsequently,an 8th-order ladder structure circuit was constructed for optimization simulation,following this model.The final configuration resulted in a SAW filter with a central frequency of 1 590 MHz,a passband insertion loss below 1.6 dB,an in-band fluctuation of 1 dB,and a bandwidth of 80 MHz(equivalent to a relative bandwidth of 5%).The alignment between the test and simulation data confirms the viability of the design approach.
关键词
COM模型/MBVD模型/梯形结构/SAW滤波器Key words
COM model/MBVD model/ladder structure/SAW filter引用本文复制引用
基金项目
四川省科技计划基金资助项目(2020YFJ0002)
出版年
2024
NETL
NSTL
万方数据