Verification of a Bend Testing Method for Thin-Film Materials
In the process of developing the Chinese national standard"Micro-electromechanical systems technolo-gy-Bend testing methods of thin film materials",cantilever beam structures with different sizes were designed and prepared to verify the accuracy and practicality of the method used.Their bending deformation processes were recor-ded by nanoindentation instrumentation,and the deformation-stress curves of the structures were obtained.The bending mechanical properties of thin-film materials can be effectively characterized based on this standard,and the measured data from the bending tests were analyzed.The experimental results show that the repeatability over 10 tests reached 0.32%using this testing method,and the same type of test structure exhbits strong regularity.The test point near the anchor of the cantilever beam exhibits high deformation stiffness,fully consistent with the theo-retical prediction.Therefore,the bending test method used in this paper has good repeatability and can be used for testing the bending mechanical properties of thin-film materials.
thin-film materialsMEMScantilever beammechanical testsbend testingnational standard
NETL
NSTL
万方数据
