JGD提拉单晶炉生长控制的智能化
Intelligent Growth Control of JGD Single Crystal Furnace
陈川贵 1丁雨憧 1龙勇 1何晔 1张晟 1王桥臻 1黄馨阅1
作者信息
- 1. 中国电子科技集团公司 第二十六研究所,重庆 401332
- 折叠
摘要
激光单晶(JGD)提拉单晶炉是一种上称重自动直径控制激光单晶炉,该单晶炉采用高精密电子秤作为传感器.JGD提拉单晶炉控制软件以晶体质量为控制目标,而其他控制软件是以功率或温度为控制目标.该控制软件将晶体理论质量与电子秤实际质量进行比较,形成闭环负反馈,以微分、积分和比例(PID)理论智能控制实现晶体生长.自动控制生长出多种高品质晶体(如InSb、YAG、LYSO、TGG、Ti:Al2O3 等),生长过程无需人为干预.软件利用SQLServer数据库收集生长过程数据,实现大数据分析.结果表明,该软件集成了远程监视功能,可提高生产效率.
Abstract
The JGD single crystal furnace is a laser-based single crystal furnace featuring automatic diameter con-trol for weighing.Unlike other single crystal furnaces that use power or temperature as control objectives,this fur-nace employs high-precision electronic scales as sensors and uses crystal weight as the control objective.The control software of the JGD single crystal furnace innovatively compares the theoretical weight of the crystal with the weight measured by the electronic scales to establish a closed-loop negative feedback system.By applying differential,inte-gral,and PID theory,the software achieves intelligent control of the crystal growth process,automatically manag-ing the growth of various high-quality crystals such as InSb,YAG,LYSO,TGG,and Ti:Al2O3 without human intervention.Additionally,the software collects growth process data using an SQLServer database for big data anal-ysis and integrates remote monitoring functions,thereby improving production efficiency.
关键词
自动化/晶体/温场/数据库/数字化/智能化Key words
automation/crystals/temperature registered/database/digitalization/intelligence引用本文复制引用
出版年
2024
NETL
NSTL
万方数据