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MEMS压电矢量水听器低噪声前置放大电路

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等效自噪声是微机电系统(MEMS)压电矢量水听器重要的性能指标,前置放大电路的噪声是其主要来源之一.为降低MEMS压电矢量水听器的自噪声,设计了一种低噪声前置放大电路.采用双JFET并联电路结构,辅以合适的偏置电路,对不同噪声源进行理论分析,优化电路参数,最终实现了噪声性能较优的低噪声前置放大电路的设计与制备.测试结果表明,在 MEMS压电矢量水听器的工作频带内,低噪声前置放大电路信号放大无失真,电压增益为43.8 dB,等效输入噪声电压谱密度为0.7 nV/√Hz@1 kHz,其噪声性能较国内外同类型的放大电路具有一定优势.
Low-Noise Preamplifier Circuit for MEMS Piezoelectric Vector Hydrophone
Equivalent self-noise is an important performance indicator for micro-electromechanical systems(MEMS)piezoelectric vector hydrophones,and the noise of the preamplifier circuit is an important consideration.This study entailed the design of a low-noise preamplifier circuit to reduce the self-noise of MEMS piezoelectric vec-tor hydrophones.By using a circuit structure with dual junction field-effect transistors(JFETs)in parallel and sup-plementing it with appropriate bias circuits,a theoretical analysis of different noise sources was conducted to opti-mize the circuit parameters.The design and fabrication of a low-noise preamplifier circuit with superior noise per-formance were ultimately achieved.The test results show that,within the operating frequency band of the MEMS piezoelectric vector hydrophone,the low-noise preamplifier circuit amplifies signals without distortion,with a volt-age gain of 43.8 dB and an equivalent input noise voltage spectral density of 0.7 nV/√Hz@1 kHz.This noise per-formance provides evident advantages over similar amplification circuits domestically and internationally.

equivalent self-noiseMEMS piezoelectric vector hydrophonepreamplifier circuit1/f noisenoise voltage spectral density

邓威、樊青青、李俊红、马军、孔超

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中国科学院 声学研究所 声场声信息国家重点实验室,北京 100190

中国科学院大学,北京 100049

等效自噪声 MEMS压电矢量水听器 前置放大电路 1/f噪声 噪声电压谱密度

国家自然科学基金资助项目国家自然科学基金资助项目中国科学院声学研究所自主部署"目标导向"类项目中国科学院声学研究所自主部署"前沿探索"类项目

1217442011874388MBDX202112QYTS202002

2024

10.11977/j.issn.1004-2474.2024.04.022

压电与声光
四川压电与声光技术研究所

压电与声光

CSTPCD北大核心
影响因子：0.357
ISSN：1004-2474
年,卷(期)：2024.46(4)