MEMS压电矢量水听器低噪声前置放大电路
Low-Noise Preamplifier Circuit for MEMS Piezoelectric Vector Hydrophone
邓威 1樊青青 2李俊红 2马军 2孔超2
作者信息
- 1. 中国科学院 声学研究所 声场声信息国家重点实验室,北京 100190;中国科学院大学,北京 100049
- 2. 中国科学院 声学研究所 声场声信息国家重点实验室,北京 100190
- 折叠
摘要
等效自噪声是微机电系统(MEMS)压电矢量水听器重要的性能指标,前置放大电路的噪声是其主要来源之一.为降低MEMS压电矢量水听器的自噪声,设计了一种低噪声前置放大电路.采用双JFET并联电路结构,辅以合适的偏置电路,对不同噪声源进行理论分析,优化电路参数,最终实现了噪声性能较优的低噪声前置放大电路的设计与制备.测试结果表明,在 MEMS压电矢量水听器的工作频带内,低噪声前置放大电路信号放大无失真,电压增益为43.8 dB,等效输入噪声电压谱密度为0.7 nV/√Hz@1 kHz,其噪声性能较国内外同类型的放大电路具有一定优势.
Abstract
Equivalent self-noise is an important performance indicator for micro-electromechanical systems(MEMS)piezoelectric vector hydrophones,and the noise of the preamplifier circuit is an important consideration.This study entailed the design of a low-noise preamplifier circuit to reduce the self-noise of MEMS piezoelectric vec-tor hydrophones.By using a circuit structure with dual junction field-effect transistors(JFETs)in parallel and sup-plementing it with appropriate bias circuits,a theoretical analysis of different noise sources was conducted to opti-mize the circuit parameters.The design and fabrication of a low-noise preamplifier circuit with superior noise per-formance were ultimately achieved.The test results show that,within the operating frequency band of the MEMS piezoelectric vector hydrophone,the low-noise preamplifier circuit amplifies signals without distortion,with a volt-age gain of 43.8 dB and an equivalent input noise voltage spectral density of 0.7 nV/√Hz@1 kHz.This noise per-formance provides evident advantages over similar amplification circuits domestically and internationally.
关键词
等效自噪声/MEMS压电矢量水听器/前置放大电路/1/f噪声/噪声电压谱密度Key words
equivalent self-noise/MEMS piezoelectric vector hydrophone/preamplifier circuit/1/f noise/noise voltage spectral density引用本文复制引用
基金项目
国家自然科学基金资助项目(12174420)
国家自然科学基金资助项目(11874388)
中国科学院声学研究所自主部署"目标导向"类项目(MBDX202112)
中国科学院声学研究所自主部署"前沿探索"类项目(QYTS202002)
出版年
2024
NETL
NSTL
万方数据