Design and Analysis of Large-Stroke Decoupling Micro-Positioning Platform
To address the issues of limited stroke and significant coupling error in currently developed micro-po-sitioning platforms,a two-degree-of-freedom micro-positioning platform,powered by piezoelectric actuators(PEA),is proposed.Additionally,a three-stage displacement amplifier is designed,which combines a two-stage le-ver amplification mechanism and Scott-Russell mechanism in series,to extend the operational stroke.The motion coupling error is eliminated by using a parallel-axis straight-circle flexible hinge and double-compound moving pair in parallel configuration.Finally,the performance of the platform is analyzed and tested via finite element simulation and experiment.The results show that the operating stroke of the designed micro-positioning platform is over 170 μm×170 μm,coupling error is within 1.2%,displacement resolution is 5 nm,and signal tracking error is 2.16%.This verifies the positioning accuracy and accuracy of the model.
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