Development of Dual-Mode Driver for Inchworm Piezoelectric Ceramic Motor
Inchworm piezoelectric ceramic motors(IWPECMs),known for their small size,long stroke,nano-positioning,and large thrust characteristics,are widely used in integrated circuit equipment and precision motion platforms.However,current IWPECMs struggle to achieve high-precision positioning and controllable displacement and velocity over long-stroke movements with existing drivers.As a result,they cannot be applied to 7 nm technol-ogy integrated circuit(IC)chip testing equipment that requires high speed and nano-positioning.To address these issues,a dual-mode driver is proposed and developed.This dual-mode driver includes displacement-voltage and ve-locity-frequency modes,which are based on the principles of charge and stress effects,respectively.The sliding mode control(SMC)method is used to reduce the voltage ripple when the dual-mode driver outputs high voltage,thereby improving the displacement resolution of the IWPECM.Finally,the hardware performance and dual-mode control of the driver were verified through experiments,further testing the performance of IWPECM.
inchworm piezoelectric ceramic motor(IWPECM)dual-mode driversliding mode controlhigh-voltage with low ripple
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