Study on Warping Change and Particles of Hydrogen Ion-Implanted Lithium Tantalate
Currently,surface acoustic wave filters urgently require high-quality lithium tantalate piezoelectric single crystal composite film substrates to improve performance.After ion implantation,wafer warpage and particle increase can easily occur,leading to defects such as irregular stripes and bonding voids during the subsequent bond-ing process,which seriously hinder the preparation of high-quality lithium tantalate piezoelectric single crystal com-posite films.The internal stress,damage,and particle changes caused by ion implantation were analyzed and char-acterized using X-ray diffraction(XRD),focused ion beam-transmission electron microscopy(FIB-TEM),particle tester,and other equipment.The reasons for the increase in warpage and particles were explained,and appropriate solutions were proposed.Finally,the implanted wafer was successfully prepared with low warpage and fewer parti-cles.Further verification of the bonding process revealed that high-quality bonded wafers without defects such as stripes and voids can be obtained,laying the foundation for the efficient preparation of lithium tantalate piezoelectric single crystal composite films.
ion implantationlithium tantalate piezoelectric waferswarpageparticlebonding
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