计及横向边缘效应的摆式差动电容倾角传感器输出特性
Output Characteristics of Pendulum Differential Capacitive Tilt Sensor Considering Lateral Edge Effect
周江 1王福谦2
作者信息
- 1. 西南交通大学希望学院,成都 610400
- 2. 电子科技大学 应用物理研究所,成都 611731
- 折叠
摘要
为了研究计及极板横向边缘效应的摆式差动电容倾角传感器的输出特性,利用保角变换法和格林函数法,讨论电容式倾角传感器的电场,得到其电容量随角位移的变化关系,通过MATLAB软件绘制出该传感器输出特性曲线,并对影响该传感器输出特性的因素做了定量分析.仿真模拟结果显示,在传感器的动极板的宽度小于静极板时,增大两极板的宽度差,再适度增大极板的间距,并减小极板直缝隙的宽度,可提高该传感器灵敏度及线性度,改善其输出特性.
Abstract
In order to study the output characteristics of a pendulum differential capacitive tilt sensor that takes into account the lateral edge effect of the capacitor plate,the conformal transformation and Green's function are used to discuss the electric field of the capacitive tilt sensor,and the relationship between its capacitance and angular displacement is obtained.The output characteristics curve of the sensor is plotted using MATLAB,and a quantitative analysis is conducted on the factors that affect the output characteristics of the sensor.The simulation results show that when the width of the moving plate of the sensor is smaller than that of the stationary plate,increasing the width difference between the two plates,moderately increasing the spacing between the plates,and reducing the width of the straight gap of the plates can improve the linearity and sensitivity of the sensor,and its output characteristics.
关键词
摆式差动电容倾角传感器/保角变换/格林函数法/边缘效应/输出特性Key words
Pendulum differential capacitive tilt sensor/Conformal mapping/Green's function/Edge effect/Output characteristics引用本文复制引用
基金项目
四川省教育科研课题(SCJG20A275)
西南交通大学希望学院优秀科技创新团队项目(20220401)
出版年
2024
NETL
NSTL
万方数据