Research on Dynamic Calibration Technology of Atomic-layer Thermopile Heat Flow Sensor
郭子聪 1李建民 1赵成文 2梁海坚 3王高1
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作者信息
1. 中北大学信息与通信工程学院,太原 030051
2. 山西江阳化工有限公司,太原 030051
3. 中北大学软件学院,太原 030051
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摘要
传统热流传感器动态校准方法,如热风洞法、激波管法等,已不能适应未来高速热流传感器的动态校准需求,存在输出热流小、热流不均匀、信号单一等问题.文中所搭建的动态测试平台,采用半导体激光器作为热流源,可以产生阶跃、脉冲、方波、扫频正弦等激励信号.时域上利用脉冲信号对传感器进行动态校准,测得其时间常数最大为87 µs,且脉冲宽度在一定范围内变化时,时间常数的变化较小;频域上利用周期性的方波信号对传感器进行动态校准,通过FFT(Fast Fourier Transform,快速傅里叶变换)得到传感器与光电探测器的频谱特性曲线计算幅值比并做归一化,得到其响应频率为2 160 Hz.
Abstract
The traditional dynamic calibration methods of heat flow sensors,such as the thermal wind tunnel method and the excitation tube method,can no longer adapt to the future demand for dynamic calibration of high-speed heat flow sensors,and there are problems such as small output heat flow,uneven heat flow,and single signal.Using a semiconductor laser as the heat flow source,the built dynamic test platform is capable of generating excitation signals such as step,pulse,square wave and swept sine.On time domain,using pulse signals for dynamic calibration of the sensor,the time constant was measured at a maximum of 87 μs,and the change of time constant is small when the pulse width changes within a certain range;on frequency domain,using a periodic square wave signal sensor for dynamic calibration,through the FFT(Fast Fourier Transform),the sensor and photodetector spectral characteristic curve to calculate the amplitude ratio is obtained and the normalization is carried out to get the frequency of its response at 2 160 Hz.
关键词
热流传感器/动态校准/时间常数/响应频率
Key words
Heat flow sensor/Dynamic calibration/Time constant/Frequency of response
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