针对膜片式水听器灵敏度和抗净水压能力无法兼得的问题,提出了一种基于银膜片的MEMS(Micro-Electro-Mechanical System,微机电系统)光纤法布里-珀罗(F-P)水听器,并对其进行了制作和测试.使用基于牺牲层的膜片工艺制作银膜片作为声压敏感单元,利用空气作为F-P腔内的材料,提升了 MEMS光纤F-P水听器的声压灵敏度.对所制备的MEMS光纤F-P水听器的性能进行了测试和分析.结果表明,该光纤F-P水听器在80～800 Hz范围内相位灵敏度在-157±3 dB re 1 rad/µPa范围内,400 Hz处的动态范围为56.21 dB.该水听器具有结构简单、灵敏度高等优势.
MEMS Fiber F-P Hydrophone Based on Silver Film
To ensure the diaphragm-based F-P hydrophone shares the sensitivity and resistance to net water pressure,a MEMS fiber F-P hydrophone is proposed,fabricated and tested.A silver membrane is fabricated using a sacrificial layer based membrane process as the sound pressure sensitive unit,and air is used as the material in the F-P cavity,thereby the sound pressure sensitivity of the fiber optic hydrophone is improved.The performance of MEMS fiber optic F-P hydrophone is tested and analyzed.The results show that the phase sensitivity of the fiber optic F-P hydrophone is-157±3 dB re lrad/μPa in the range of 80～800 Hz,and the dynamic range at 400 Hz is 56.21 dB.This hydrophone has advantages such as simple structure and high sensitivity.
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