Hexafluorobutadiene has attracted much attention due to its advantages of precise etching and environ-mental protection,and has become an ideal product for a new generation of electronic etching gas.At present,the reported preparation routes of hexafluorobutadiene are complex and diverse.Taking the key intermediates involved in the existing preparation methods as the classification standard,the current mainstream preparation processes are summarized,and the progress made at this stage is discussed.On this basis,the problems existing in the mainstream preparation process are summarized and the future feasible technology research and development direction is prospected.
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