摘要
电子级氢氟酸是湿电子化学品中的一种,主要应用于集成电路、液晶显示器、太阳能光伏、LED制造等工艺中.综述了电子级氢氟酸的常用提纯技术、关键技术和质量指标等,并对制备方法、关键技术等进行对比分析,最后对技术及行业发展进行了展望.
Abstract
Electronic grade hydrofluoric acid is one of the wet electronic chemicals,mainly used in integrated circuit,liquid crystal display,solar photovoltaic,LED manufacturing process.The common purification technology,production process,key technology and quality index of electronic grade hydrofluoric acid are reviewed.The preparation method and key technology are compared and analyzed.Finally,the development of technology and industry is prospected.
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