曝光工艺对蓝相液晶图案清晰度的影响
Influence of exposure process on the clarity of blue phase liquid crystal patterns
杜怡珂 1许雪敬 1高涵 1朱吉亮 1周璇1
作者信息
- 1. 河北工业大学 理学院,天津 300401
- 折叠
摘要
为提高图案化蓝相液晶薄膜(Blue Phase Liquid Crystal Film,BPLCF)的边缘分辨率,使图案更清晰,降低制备工艺难度,本文基于硫醇-丙烯酸酯迈克尔加成反应,在恒温下利用分步掩膜曝光的方式设计并制备了图案化BPLCF.首先,观察BPLCF光学特性随迈克尔加成反应过程进行的变化,结合光谱的半峰宽和反射强度,确定BP I织构相对较好的反应时间;接着,根据选定的反应时间,探究在相同紫外曝光时间下,不同曝光强度对BPLCF光学性能和图案分辨率的影响,得到使图案化BPLCF具有清晰图案和高边缘分辨率的最佳紫外曝光强度;最后,根据实验得到的反应时间和紫外曝光强度,制备了具有高分辨率兰花和梅花图案的BPLCF.实验结果表明,在33℃的恒温下,当迈克尔加成反应时间为60 min、紫外曝光强度为30 mW/cm2、曝光时间为15 s时,BP I结构保留完好,BPLCF图案清晰,边界无阴影,对应的中心波长和半峰宽分别为528 nm和53 nm,此时分辨率可达38 μm.该研究对于制备高分辨率的蓝相液晶图案及其在信息防伪以及显示领域的应用具有重要意义.
Abstract
In order to improve the edge resolution of patterned Blue Phase Liquid Crystal Films(BPLCF)and make the patterns clearer while reducing the complexity of the preparation process,based on the thiola-crylate Michael addition reaction,this study utilizes stepwise mask exposure under constant temperature to design and prepare patterned BPLCF.Firstly,the changes in the optical properties of BPLCF during the Michael addition reaction were observed.Combining the spectral full width at half maximum(FWHM)and reflectance,the reaction time with relatively good BP I texture was determined.Then,based on the selected reaction time,the effects of different exposure intensities on the optical performance and pattern resolution of BPLCF under the same UV exposure time were explored.The optimal UV exposure intensity for producing patterned BPLCF with clear patterns and high edge resolution was determined.Finally,according to the experimentally obtained reaction time and UV exposure intensity,BPLCF with high-resolution orchid and plum blossom patterns were prepared.Experimental results showed that at a constant temperature of 33℃,Michael addition reaction time of 60 min,UV exposure intensity of 30 mW/cm²,and exposure time of 15 s,the BP I structure was well preserved,the BPLCF pattern was clear with no shadow at the edge,and the corresponding central wavelength and FWHM were 528 nm and 53 nm,respectively,with a resolution of up to 38 μm.This research is of great significance for the preparation of high-resolution blue phase liquid crystal patterns and their applications in information anti-counterfeiting and display fields.
关键词
蓝相液晶/图案化/迈克尔加成反应/高分辨率/紫外曝光强度Key words
blue phase liquid crystal/patterned/michael addition reaction/high resolution/UV exposure intensity引用本文复制引用
基金项目
河北省自然科学基金(A2023202010)
河北省自然科学基金(F2020202015)
出版年
2024
国家科技期刊平台
NSTL
万方数据