Determination of Trace Amounts of Monomethyltrichlorosilane in Dimethyldichlorosilane
The rxt-200 capillary chromatography column was used for separation,and the content of trace amounts of methyltrichlorosilane(M1)in high-purity dimethyldichlorosilane(M2)was determined by gas chromatography external standard method.The results showed that the method had good separation,reproducibility,and accuracy.This method has been successfully applied to the detection of trace M1 content in high-purity M2 products of distillation plants,with good results.
DimethyldichlorosilaneMethyltrichlorosilaneExternal standard methodGas chromatography
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