TiO2 and SiO2 materials were prepared using the sol-gel method.By combining the design of gradient refractive index,different ratios of TiO2/SiO2 were deposited on GaAs solar cells to achieve a broadband anti-reflective effect.The finally prepared 6-layer anti-reflective film has an average reflec-tance of 8.7％in the wavelength range of 200～1 800 nm.It was also determined that annealing at 300℃ and pulling speed at 1 000 μm/s are the optimal process conditions for preparing the film.
关键词
溶胶凝胶/梯度折射率/宽带减反射膜
Key words
Sol-gel/Gradient refractive index/Broadband anti-reflective film
维普
万方数据