摘要
针对化学气相沉积法制备ZnS材料颜色变化、可见光散射等问题,采用自主开发的ZnS沉积系统,通过调整沉积工艺条件Zn/S比、沉积温度等相关条件,开展一系列从低温到高温、富Zn到富S的生长沉积试验.研究结果表明:制备的ZnS呈现灰色(富Zn、较低温)→浅白色(富S、较高温)的变化规律,颜色偏红的ZnS透过性能更好;沉积温度过高,ZnS生长快,晶体中微孔和六方相结构ZnS会增多,造成光的散射增加,影响材料的透过性能.
Abstract
For material color change,visible light scattering,and other problems in ZnS prepared by the chemical vapor deposition method,the self-developed ZnS deposition system is adopted for tests that adjust of Zn/S ratio in deposition process condition,of deposition temperature and the other relative conditions,a series growth deposition tests from low temperature to high temperature,from Zn-rich to S-rich.The study results show that the varying pattern of the prepared ZnS appears as grey(Zn-rich,lower temperature),light white(S-rich,higher temperature),ZnS with the color is reddish has better permeability;the deposition temperature is higher,the growth of ZnS is fast,the microporous and hexagonal phase structure in crystals,ZnS can increase,it caused the scattering of light increases,it can affect the permeability performance of materials.
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