首页|基于多频磁场耦合的平面二维位移传感器

基于多频磁场耦合的平面二维位移传感器

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针对目前光刻机、超精密数控机床等高端超精密装备对于精准平面定位的要求,提出了一种基于多频磁场耦合的平面二维位移传感器.传感器组成为定尺和动尺,其中定尺由导磁基体和X、Y方向励磁线圈构成,动尺由导磁基体和X、Y方向感应线圈构成.通过对X、Y方向励磁线圈通入正余弦励磁信号,在定尺上构建出多频磁场耦合的二维均匀磁场阵列,动尺感应出带有位移信息的电信号,经过理论推导和电磁仿真验证了多频磁场直接解耦差动结构和幅值调制解算方法的可行性,并对仿真误差进行分析,并优化了传感器结构.最后采用PCB工艺制作传感器样机并开展相关实验研究,实验结果表明:传感器在150 mm×150 mm的测量范围可对二维位移进行精确测量,其中X方向测量精度为±33.08 µm,Y方向测量精度为±36.95 μm,优化后的传感器样机X、Y方向原始对极内位移误差峰峰值在原有基础上降低了 49.1％和50.7％.
Planar two-dimensional displacement sensor based on multi-frequency magnetic field coupling
To meet the requirement of high-end ultra-precision equipment,such as photolithography machines and ultra-precision CNC machine tools for precise plane positioning,a planar two-dimensional displacement sensor based on multi-frequency magnetic field coupling is proposed.The sensor consists of a fixed length and a moving ruler.The fixed length is composed of a magnetically conductive substrate and an excitation coil in X-and Y-directions,and the moving ruler is composed of a magnetically conductive substrate and an induction coil in X-and Y-directions.By passing sine and cosine excitation signals to the excitation coils in X-and Y-direction,a two-dimensional uniform magnetic field array with multi-frequency magnetic field coupling is established on the fixed scale,and an electrical signal with displacement information is induced by the moving ruler.The feasibility of the multi-frequency magnetic field direct decoupling differential structure and amplitude modulation solution methods are evaluated through theoretical derivation and electromagnetic simulation.The simulation error is analyzed,and the sensor structure is optimized.Finally,the sensor prototype is manufactured by the PCB process and related experimental research is carried out.The experimental results show that the sensor can accurately measure the two-dimensional displacement in the measuring range of 150 mm × 150 mm.The measurement accuracy of the X-direction is±33.08 µm and the measurement accuracy in the Y-direction is±36.95 µm.The peak-to-peak values of the original internal displacement errors in the X and Y directions of the optimized sensor prototype are reduced by 49.1％and 50.7％on the original basis.

two-dimensional displacement sensorplanar two-dimensional displacement measurementmulti-frequency magnetic field coupling

杨继森、庹万章、张静、冯济琴、卢渝

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重庆理工大学机械检测技术与装备教育部工程研究中心 重庆 400054

重庆理工大学汽车零部件先进制造技术教育部重点实验室 重庆 400054

重庆理工大学时栅传感及先进检测技术重点市重点实验室 重庆 400054

重庆理工大学电气与电子工程学院 重庆 400054

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二维位移传感器 平面二维位移测量 多频磁场耦合

国家自然科学基金重庆市自然科学基金面上项目重庆市自然科学基金面上项目重庆市教委科学技术研究计划重点项目重庆理工大学研究生教育高质量发展行动计划

52175454CSTB2023NSCQ-MSX0382cstc202ljcyjmsxmX0512KJZD-K202301106gzlcx20232136

2024

10.19650/j.cnki.cjsi.J2311666

仪器仪表学报
中国仪器仪表学会

仪器仪表学报

CSTPCD北大核心
影响因子：2.372
ISSN：0254-3087
年,卷(期)：2024.45(2)
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