三层液精炼法提纯多晶硅的研究
Removal of Boron and Phosphorus from Silicon by Three-layer Refining
李翔 1袁亮 2李克帆 2纪睿 2展亦馨 2唐恺3
作者信息
- 1. 江苏大学 能源与动力工程学院,江苏镇江 212013;泰州东博新材料有限公司,山东泰州 225300
- 2. 江苏大学 能源与动力工程学院,江苏镇江 212013
- 3. 挪威科技工业研究院,挪威特隆赫姆N-7465
- 折叠
摘要
在高温下利用密度差别,以熔硅、熔渣和熔铁(或铜)构建Si/Slag/Me三层液体系.冶金硅中的B和P杂质扩散到熔渣和底层金属中,达到提纯冶金硅的目的.热力学计算结果证明了这种方法具有可行性.实验研究分析了底层金属类型、炉渣成分及反应温度对B和P去除率的影响.结果表明:底层金属可有效吸收冶金硅中的P,其中铁比铜有更好的P吸收效果.底层金属对B的吸收效果不佳,B的去除主要归功于造渣提纯过程.在炉渣中加入10 wt％的CaF2,降低了渣黏度,可显著提高B和P的去除率.1 600～1 700 ℃温度范围内,提高反应温度有利于B的去除,对P的去除无显著作用.
Abstract
A new refining concept aims to remove both B and P simultaneously in silicon has been proposed in Si/Slag/Me(Me:Fe or Cu)system.Both liquid Si and liquid Fe/Cu phases are separated by the molten slag phase spontaneously based on their physicochemical properties.Equilibrium evaluations indicate that both the B and P,the most difficult impurities to be removed from ultra-pure silicon,can be redistributed to the slag and another metal phase.It is experimentally shown that the simultaneous removal of both B and P via a single metallurgical refining process is possible by three-layer refining.The metal phase plays an P impurity collector role in the system,but has little effect on B adsorptions.Liquid Fe works better than the molten Cu for P adsorptions.Addition of CaF2 to the binary CaO-SiO2 slag increase significantly the remove rates of B and P,due to CaF2 can reduce the viscosity of slag.Increasing temperature from 1 600 C to 1 700 C improves the B remove rate significantly,but has little effect on P remove.
关键词
三相平衡/多晶硅/提纯/热力学模拟Key words
three-phase distribution equilibria/polysilicon/purification/thermodynamic simulation引用本文复制引用
基金项目
江苏省博士后科研资助计划项目(2021K180B)
泰州市科技支撑计划项目(TS202202)
江苏大学高级人才科研启动基金(18JDG015)
出版年
2024
NETL
NSTL
万方数据