准分子激光器用铜电极研究进展
Research Progress of Copper Electrodes for Excimer Lasers
阚金锋 1吕成伟 1马放 1齐石磊 1张旭1
作者信息
- 1. 北京科益虹源光电技术有限公司,北京 100176
- 折叠
摘要
文章通过分析准分子激光器用电极的腐蚀机理,重点介绍了铜合金电极在材料设计、组织调控和结构优化等方面的研究进展,并最终指出了准分子激光器用铜电极的改进方向.
Abstract
By analyzing the corrosion mechanism of excimer laser electrodes,this paper focuses on the research progress of copper alloy electrodes in material design,microstructure control and structure optimization,and finally points out the improvement direction of copper electrodes for excimer laser.
关键词
铜合金电极/准分子激光器/腐蚀机理/氟腐蚀行为Key words
copper alloy electrodes/excimer lasers/corrosion mechanism/fluorine corrosion behavior引用本文复制引用
出版年
2024
NETL
NSTL
维普
万方数据