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烧结温度对钛铝靶材性能的影响

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文章采用热等静压工艺制备钛铝合金靶材(Ti∶Al=1∶1,at.%),研究烧结温度(1 150~1 350℃)对钛铝靶材性能的影响.结果表明,在保温时间均为 2h,保压压力均为 130 MPa时,当烧结温度为 1 250℃时所制备的钛铝合金靶材综合性能最好,靶材的致密度为 99.72%,晶粒尺寸为 78.70 μm,维氏硬度为 399.7HV,Ti元素和Al元素均匀分布.通过晶粒生长动力学方程计算出钛铝靶材的晶粒长大激活能为 76.4 KJ/mol.
Effect of Sintering Temperature on Properties of TiAl Target
In this paper,titanium aluminum alloy target(Ti:Al=1:1,at%)is prepared by hot isostatic pressing process.The effect of sintering temperature(1150~1350℃)on the properties of titanium aluminum target is studied.The result suggested that the excellent performance of the TiAl alloy target prepared at the sintering temperature at 1250℃ when the holding time is 2h and the holding pressure is 130MPa,the relative density of target is 99.72%,the average grain size is 78.70μm,vickers hardness is 399.7HV,Ti and Al elements are uniformly distributed in the target.The grain growth activation energy of TiAl target is calculated to be 76.4KJ/mol by the Brook dynamic model of grain growth.

TiAl alloy targethot isostatic pressing processsintering temperaturetarget propertiesactivation energy

李心然、居炎鹏、赵泽良、王永超

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河南东微电子材料有限公司,河南 郑州 451100

钛铝合金靶材 热等静压工艺 烧结温度 靶材性能 激活能

2024

有色金属加工
中国有色金属工业协会 洛阳有色金属加工设计研究院

有色金属加工

影响因子:0.263
ISSN:1671-6795
年,卷(期):2024.53(3)