Mid-infrared trap detector technology based on cryogenic integrating sphere
杨晓阳 1申曼玲 2王大辉 2杨鹏翎 2李向阳1
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作者信息
1. 中国科学院上海技术物理研究所,上海 200083
2. 西北核技术研究院,陕西西安 710024
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摘要
针对中波红外辐射测量定标的需求,提出了将微型积分球与中红外探测器集成在低温环境中.验证比对了几种用于制作积分球内腔表面的材料样品,通过宽光谱反射率、特征光谱反射率、双向反射分布函数(bidirectional reflectance distribution function,BRDF),以及用激光共聚焦显微镜、扫描电子显微镜(scanning electron microscope,SEM)等进行微观表面形貌的测量,获得了适用于制作中红外积分球的内腔表面制作工艺.BRDF测试结果显示,制作的内腔表面接近朗伯反射表面.测试了积分球探测器样品的光谱与电学性能,经过表面粗糙化处理并蒸镀金属反射膜,样品的光谱波段适应性好,光强衰减比为 0.067 4,经计算,积分球内腔壁的反射率为 96.4%;同时,低温积分球的引入,使探测器芯片的噪声由3.5×10-12 A·Hz-1/2 降低至1.0×10-12 A·Hz-1/2.
Abstract
To meet the requirements of mid-wave infrared radiation measurement and calibration,the micro integrating sphere and mid-infrared detector were integrated in cryogenic environment.Several samples used to make the inner cavity surface of the integrating sphere were verified and compared.Through the measurement of broad-spectrum reflectivity,characteristic spectrum reflectivity,bidirectional reflectance distribution function(BRDF),laser confocal microscope,scanning electron microscope(SEM)and other micro-surface morphologies,the inner cavity surface fabrication process suitable for making the mid-infrared integrating sphere was obtained.The BRDF test results show that it is close to the Lambert reflection surface.The spectral and electrical properties of the integrating sphere detector sample were tested.The spectral band of the sample after surface roughening treatment and evaporation of metal reflection film has good adaptability,the light intensity attenuation ratio is 0.067 4,and the reflectivity of the inner cavity wall of integrating sphere is 96.4%by calculation.At the same time,the introduction of the cryogenic integrating sphere reduces the noise of the detector chip from 3.5×10-12 A·Hz-1/2 to 1.0×10-12 A·Hz-1/2.
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