空间载波技术最优系统误差的设计方法
Design Method for Optimal Systematic Error of Space Carrier Technology
孙佳兴 1翟天保 2黎欣瑜 3崔佳雯 4胡晓莉 1李志松1
作者信息
- 1. 上海电机学院机械学院,上海 201306
- 2. 上海乾曜光学科技有限公司,上海 201800
- 3. 华北电力大学控制工程与计算机工程学院,北京 100096
- 4. 华东理工大学机械与动力工程学院,上海 200237
- 折叠
摘要
在光学面形检测领域中,利用空间载波相移技术可以实现对待测面形的快速、动态测量,而系统误差的引入一直是制约其精度的重要因素.针对此问题,提出一种自适应引入最优系统误差的方法.该方法对不同规格的待测镜引入不同的载波量,将系统回程误差控制在合理范围内,提升了空间载波面形检测的精度,其过程可概括如下:首先,预估待测镜PV值,平面镜默认为0.3λ,球面镜通过获取其曲率半径R和口径φ,代入PV值计算公式计算其PV值;其次,令系统回程误差所占权重与待测镜PV值所占权重相等;最后,通过系统回程误差计算公式反推待测镜倾角与载波条纹数,并判断是否满足载波条纹数的取值范围.实验证明,该方法相比于传统空间载波技术中的固定条纹法,平面镜的检测精度提高了约10％,球面镜的检测精度提高了约15％.
Abstract
In the field of optical surface shape detection,the use of space carrier phase shift technology can realize the rapid and dynamic measurement of the surface shape to be measured,and the introduction of systematic error has always been an impor-tant factor restricting its accuracy.In order to solve this problem,this paper proposes a method for adaptive introduction of op-timal systematic error.This method realizes the introduction of different carrier amounts for different specifications of the mir-ror to be tested,controls the system backhaul error within a reasonable range,and improves the accuracy of space carrier sur-face shape detection,and the process can be summarized as follows:First,estimate the PV value of the mirror to be measured.The default of the plane mirror is 0.3λ,and the spherical mirror calculates its PV value by obtaining its radius of curvature R and aperture φ,and substitutes the PV value calculation formula;secondly,the weight of the system backhaul error is equal to the weight of the PV value of the mirror to be measured;finally,the inclination angle of the mirror to be measured is inferred and the number of carrier fringes through the system backhaul error calculation formula,and whether the value range of the number of carrier fringes is judged.Experimental results demonstrate that,compared to the fixed fringe method in traditional spatial carrier techniques,this method improves the detection accuracy of flat mirrors by approximately 10％and the detection accuracy of spherical mirrors by approximately 15％.
关键词
激光干涉/面形测量/空间载波移相/载波条纹/傅里叶变换/回程误差Key words
laser interferometry/surface shape measurement/space carrier phase shift/carrier fringes/fourier trans-form/retrace error引用本文复制引用
基金项目
国家自然科学基金(51975116)
上海市自然科学基金(21ZR1424600)
上海市自然科学基金(21ZR1402900)
出版年
2024
NETL
NSTL
万方数据