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差分式声表面波温度应变复合传感器

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基于声表面波理论和微扰理论,提出了并研制由3个谐振器组成的差分式声表面波温度应变复合传感器.通过有限元分析软件对AT切和XY切的两种声表面波谐振器进行了仿真,根据其频率-应变响应和频率-温度响应,设计并研制了能够进行温度补偿和应力-应变补偿的温度应变传感器,传感器的应力测量灵敏度为100 Hz/με,温度测量灵敏度为80 kHz/℃.该传感器成功应用到了隔离开关的状态监测.现场测试表明,该传感器对隔离开关触指温度和应变的检测可实现对隔离开关工作状态的有效判别,在未来的电力系统设备在线检测中具有重要的应用前景.
Temperature and stress-strain state monitoring of isolation switch based on surface acoustic wave sensing technology
Based on surface acoustic wave(SAW)theory and perturbation theory,this paper proposes and develops a differential SAW temperature-strain composite sensor composed of three resonators for the first time.Two SAW resonators of AT cut and XY cut were simulated by finite element analysis software.According to their frequency-strain response and frequency-temperature response,a temperature-strain sensor capable of temperature compensation and strain compensation was designed and developed.The stress measurement sensitivity is 100 Hz/με,and the temperature measurement sensitivity is 80 kHz/℃.The sensor has been successfully applied to the state monitoring of the isolating switch.Experimental data at testing ground show that the sensor can detect the temperature and strain of the isolating switch's fingers,which can effectively discriminate the working state of the isolating switch.

Surface acoustic waveFrequency shiftTemperatureStrainIsolation switch

郭大鹏、王冠夫、史汝川、吴润发、沈衍、白洪涛

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上海交通大学电子信息与电气工程学院 上海 200240

劭行(苏州)智能科技有限公司 上海 200240

国网辽宁省电力有限公司辽阳公司 辽阳 111000

声表面波 频率偏移 温度 应变 隔离开关

国家电网辽宁省电力公司管理科技项目

2021YF-31

2024

应用声学
中国科学院声学研究所

应用声学

CSTPCD北大核心
影响因子:1.128
ISSN:1000-310X
年,卷(期):2024.43(2)
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