A Non-parametric Gradient-Based Shape Optimization Approach for Solving Inverse Problems in Directed Self-Assembly of Block Copolymers

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外文摘要：We consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts.Specifically,we model polymer self-assembly using the self-consistent field theory and derive,in a non-parametric setting,the sensitivity of the dissimilarity between the desired and the actual morphologies to arbitrary perturbations in the guiding pattern shape.The sensitivity is then used for the optimization of the confining pattern shapes such that the dissimilarity between the desired and the actual morphologies is minimized.The efficiency and robustness of the proposed gradient-based algorithm are demonstrated in a number of examples related to templating vertical intercon-nect accesses(VIA).

外文关键词：

Block copolymersDirected self-assemblyInverse designShape optimizationVertical interconnect accesses(VIA)

作者：

Daniil Bochkov、Frederic Gibou

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作者单位：

Department of Mechanical Engineering,University of California,Santa Barbara,Santa Barbara,CA 93106,USA

Department of Computer Science,University of California,Santa Barbara,Santa Barbara,CA 93106,USA

基金：

NSF DMS 1620471

项目编号：

出版年：

2024

DOI：

10.1007/s42967-024-00394-x

应用数学与计算数学学报

上海大学

应用数学与计算数学学报

影响因子：0.165

ISSN：1006-6330

年,卷(期)：2024.6(2)