首页|感光干膜微结构模具制备关键技术

感光干膜微结构模具制备关键技术

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基于负性感光干膜的微结构模具制备关键技术,针对压膜、紫外曝光和显影等主要工艺环节,给出光源光谱特性、紫外光源功率、曝光时间、显影时间、显影液浓度等关键试验参数的选择优化和试验现象原因分析,并对极限试验条件下干膜性状进行研究,为干膜存储、裁剪、晾放时间提供技术支持.利用该工艺制备的干膜微结构模具,可封装不同结构和功能的聚二甲基硅氧烷(PDMS)微流控芯片.试验结果表明,与传统光刻微流控模具制备方法相比,负性感光干膜的微流控模具制备方法具有省时、工艺简单、无需超洁室和价格昂贵的曝光设备等优点,且制备的干膜微流控模具表面平整度高、成功率高,应用效果良好.
Key Technologies for the Fabrication of Photographic Dry Film Microstructure Molds
The key techniques of micro-structure mold fabrication based on negative photosensitive dry film are presented.The key experimental parameters such as spectral characteristics of light source,ultraviolet light source power,exposure time,developing time and developing concentration are selected and optimized,and the causes of experimental phenomena are analyzed.Furthermore,the properties of dry film under the limit experimental conditions are studied to provide technical support for dry film storage,cutting and airing time.The dry film microstructure mold prepared by this process can encapsulate polydimethylsiloxane(PDMS)microfluidic chips with different structures and functions.The experimental results show that compared with the traditional soft lithography method,the dry film microstructure mold fabrication process has the advantages of saving time,simple process,no ultra-clean room and expensive exposure equipment,etc.The prepared dry film microstructure mold has high surface flatness and success rate,and good application effect.

photosensitive dry filmmicrostructure moldspectral characteristicpressed filmexposuredeveloping

刘旭玲、刘威、左文思、叶国勇、金少搏、李松晶

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郑州轻工业大学机电工程学院,河南郑州 450002

哈尔滨工业大学机电工程学院,黑龙江哈尔滨 150001

感光干膜 微结构模具 光谱特性 压膜 曝光 显影

国家自然科学基金河南省科技攻关计划河南省交通厅科技项目河南省交通厅科技项目

520054532321023200562020J12020J2

2024

液压与气动
北京机械工业自动化研究所

液压与气动

CSTPCD北大核心
影响因子:0.453
ISSN:1000-4858
年,卷(期):2024.48(2)
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