Design and Characterization of a Diaphragm-type Hydraulic Micro-displacement Actuator
Micro-displacement actuators are crucial for high-precision control and find extensive applications in precision servo systems,chip production,and ultra-precision machining.To address the issues of complex structure,low output force,and short stroke in traditional micro-displacement actuators,a diaphragm-type hydraulic actuator based on Pascal's principle is proposed.First,a mechanical model for the actuator under composite loads is established,and an iterative stress-strain solution is derived using the successive correction method.Next,the effects of key actuator parameters on stroke and stress are analyzed.Based on this,an optimization design process is developed,considering material strength and design stroke as constraints.Finite element simulations validate the actuator's driving pressure-displacement characteristics,stroke,and load capacity.The results demonstrate that the actuator provides a linear drive pressure-displacement relationship and a significantly higher elongation of 40 μm/mm compared to piezoelectric ceramics.At a drive pressure of 4 MPa,the actuator achieves a stroke of 1 mm and delivers a maximum output force of 10790 N,maintaining a stroke of 0.5 mm even under an external load of 5395 N.
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