Visualization of the Gas-liquid Interface Behavior Based on Background Oriented Schlieren Technique
Gas sealing technology is the main mechanism for maintaining the stability of the immersion flow field.The gas jet impinges on the wafer surface to prevent the leakage of the immersion liquid,which can lead to overlay errors and exposure defects.The interaction between the immersion flow field and the sealing gas flow and the behavior characteristics of the gas-liquid interface are necessary to investigate.The background oriented schlieren technique is used for observing the gas jet.The measurement principle and hardware construction of this visualization technology are introduced.Through the optimized optical path design,synchronous observation of both the gas-liquid and internal-external flow fields,enabling a comprehensive study of interface behavior characteristics.This study can offer valuable guidance for the application of non-contact measurement techniques such as background oriented schlieren technology in ultra-clean fluidics.
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维普
