Pneumatic Vibration Isolation H∞ Active Control Based on Isothermal Cavity
Pneumatic vibration isolation is a critical system for maintaining a clean,minimally vibrating work environment in precision instrumentation and semiconductor manufacturing.Passive pneumatic isolation cannot meet the needs of low-frequency vibration isolation and even generate resonance phenomena.An active pneumatic vibration isolator based on an isothermal cavity is developed,and a H∞ control method is used to suppress the interference of low-frequency vibration.First,isothermal material is used in the vibration isolator cavity to reduce temperature effects during inflation and deflation.Then,a controller based on Robust H∞ control theory is designed to suppress low-frequency vibrations robustly.Finally,an excitation signal of 1～10 Hz is applied to test the performance of the pneumatic vibration isolation system under H∞ active control and compare it with the passive vibration isolation effect.The results show that the incorporation of isothermal materials reduces the temperature variation of the chamber inflation and deflation process,and the active control method improves the vibration isolation performance in the low-frequency range and effectively attenuates the resonance peaks of the system.
pneumatic vibration isolationconstant temperature roomtemperature changesRobust H∞ control
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