Optimization Simulation of Temperature Field in ALD Pressure Sintering Furnace Based on Fluent
The temperature field in the pressure sintering furnace is simulated by ANSYS FLUENT,and the temperature distribution in the high temperature section(furnace temperature is 1450℃)is analyzed.It is found that the temperature distribution in the furnace is uneven,the batch temperature difference reaches 16℃,and the temperature difference of products at the furnace door is the largest.It is considered that the shape and distribution of the heating element have the greatest influence on the uniformity of the temperature field.To optimize the temperature distribution in the furnace,three improvement schemes are put forward,such as increasing the size of the heating element at the furnace door and adding a heating ring or rod at the furnace door.The result shows that after changing the number,structure,and distribution of heating elements,the batch temperature difference of products in the furnace with three optimization schemes decreases by 4.6 ℃,3.2 ℃,and 2.8 ℃ respectively.Specifically,increasing the size of the heating rod at the furnace door has the best optimization effect.It not only significantly reduces the temperature difference of the products at the furnace door,but also improves the temperature uniformity of products in the loading area,which provides a guarantee for improving the quality of sintered products.
temperature fieldpressure sintering furnaceuniformityheating element
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