首页|4H-SiC探测器的温度及辐照性能研究

4H-SiC探测器的温度及辐照性能研究

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针对极端环境下耐高温和耐辐照半导体探测器的研制需求,利用外延层厚度为100 μm的4H-SiC外延片通过欧姆接触和肖特基接触制备成肖特基二极管,封装成肖特基二极管探测器.在25 ℃~150 ℃的环境下,测量探测器的Ⅰ-Ⅴ特性曲线.结果表明,在温度≤105℃时,漏电流曲线变化较小.当偏置电压为-500 V时,温度从25 ℃上升至105 ℃,漏电流的变化率为0.33%/℃.利用北京大学化学系60Co放射源对探测器进行辐照,对比总剂量1Mrad的实验前、实验后的探测器Ⅰ-Ⅴ特性变化.结果表明,辐照前后探测器的漏电流无明显变化.
Temperature and Radiation Performance of 4H-SiC Detector
Schottky diodes are fabricated using 100 μm thick 4H-SiC epitaxial wafers with Ohmic and Schottky contacts,and packaged as SiC detectors to meet the requirements of high temperature and radiation environments.The current-voltage(I-V)curves are measured in the range of 25 to 150 ℃.The experimental results show that the leakage current changes very little when the temperature is less than or equal to 105 ℃.The change rate of leakage current is 0.33%/℃,when the reverse bias is-500 V and the temperature rises from 25 to 105 ℃.The SiC detector is irradiated by 60Co source in Peking University.The I-V characteristics of the SiC detector are compared before and after the irradiation experiment with total dose of 1 Mrad.The experimental data indicates that the leakage current has almost no significant change.

SiC detectorleakage currentradiation damage

张耀锋、杜园园、张春雷、曹李刚、兰小飞、黄永盛

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北京师范大学核科学与技术学院,北京 100875

北京师范大学射线束技术与材料改性教育部重点实验室,北京 100875

中国科学院高能物理研究所粒子天体物理重点实验室,北京 100049

西华师范大学,四川南充 637009

中山大学深圳校区,广东深圳 518107

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SiC探测器 漏电流 辐照损伤

国家自然科学基金资助项目计量与校准技术国防科技重点实验室开放课题

11605009JLKG2022001C003

2024

原子核物理评论
中国科学院近代物理研究所,中国核物理学会

原子核物理评论

CSTPCD北大核心
影响因子:0.181
ISSN:1007-4627
年,卷(期):2024.41(1)
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