Preparation and Lifetime Research of Diamond-like Carbon Stripper Foil
The diamond-like carbon(DLC)stripper foils with～5 μg/cm2 in thickness were produced by using the composite technology of the filtered cathodic vacuum arc(FCVA)-alternating current carbon arc(ACCA)-relaxation technique.The uni-formity of the DLC foils were measured by the XP2U balance.The results show that the maximum inhomongeneity of DLC foils in the range of Φ100 mm is 8.82％.The microstructure of the DLC foils were measured by the scanning electron micro-scopy(SEM),Raman spectroscopy and X-ray photoelectron spectroscopy(XPS).The SEM images show that the DLC foils are smooth,and contain hardly droplets through the double 90° filters.The Raman spectrum indicates that the DLC foils are amorphous carbon films.The X-ray photoelectron spectrum indicates the sp3 bonds of the DLC foils exceed 70％.The irradi-ation lifetimes of the DLC stripper foils were tested with the heavy ion beams at the Beijing HI-13 Tandem Accelerator.The results indicate that the lifetime of the DLC stripper foils after relaxation is～3 times of the DLC stripper foils before relaxa-tion.The lifetime of DLC stripper foil is respectively 4 and 13 times of the carbon stripper foil for the 197Au-and 63Cu-ion beams(～9 MV,～1 μA).The lifetime of DLC stripper foil is 2.6～10.0 times of the carbon stripper foil for the 107 Ag-、70Ge-、48Ti-、28Si-and 127I-ion beams.The heavier ions and the stronger beam current,the longer lifetime of DLC stripper foil compared with that of carbon stripper foil.The lifetime of the DLC stripper foils is related to the substrate bias voltage,and in-creases at first and then decreases with the increasing of the substrate bias voltage.The lifetime reaches the peak value when the substrate bias voltage is-400 V.
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