Diamond-like carbon(DLC)coating was prepared on 316L stainless steel by plasma enhanced chemical vapor deposition technology.The surface morphology and structure,friction and wear behavior under different loads and corrosion behavior of NaCl solution(3.5wt%)un-der different soaking time were studied.The results show that the prepared DLC coating is an a-morphous carbon structure coating formed by hybridization of sp2 bond and sp3 bond,in which the content of sp2 bond is higher than sp3 bond,and its properties are similar to diamond-like carbon coating.The DLC coating has a dense structure and a smooth surface with a roughness of only Ra=12.1 nm,which can tightly bond with the 316L stainless steel substrate;The contact angle of DLC coating is 59.44°,indicating that the coating exhibits certain wettability.The fric-tion and wear test results show that the DLC coating has good lubrication effect,with a friction coefficient as low as 0.07～0.16 and a wear rate as low as(33.85～6.71)×10-7mm3/N·m.Electrochemical testing showed that the self corrosion current density of DLC coating was 6.72×10-6 A·cm-2,and the impedance modulus was as high as 7.05×104 Ω·cm-2.These indicate that the DLC coating prepared by PECVD technology has excellent tribological and corrosion re-sistance properties,which can form good protective properties for 316L stainless steel substrate materials.
关键词
PECVD/类金刚石/摩擦磨损/电化学腐蚀
Key words
PECVD,diamond-like carbon,friction and wear/electrochemical corrosion
维普
万方数据