摘要
金刚石薄膜具有导热率高、弹性模量大、沉积速度快、化学稳定性好、耐腐蚀等优势,在工业废水处理、生物医学、光学涂层、电子电气、切削刀具等领域应用广泛.文章综述了在低微波功率下衬底的预处理方法、沉积气压、流量比等因素对化学气相沉积制备高质量的金刚石薄膜的影响,介绍了游离磨料研磨过程中驱动方式及工艺参数等对加工后工件的平面度和粗糙度的影响,并探讨了其他多种研磨方式来实现对多晶金刚石片均匀性研磨,为广大学者进一步研究及应用提供参考.
Abstract
Diamond films have many advantages such as high thermal conductivity,large elastic modulus,fast deposition rate,good chemical stability,and corrosion resistance.They are widely used in various fields such as industrial wastewater treatment,biomedic-al,optical coatings,electronic and electrical,cutting tools,etc.The article summarizes the effects of pretreatment methods of substrates,deposition pressure,flow ratio,and other factors on the preparation of high-quality diamond films by chemical vapor deposi-tion under low microwave power.It also introduces the effects of driving mode and process parameters on the flatness and roughness of processed workpieces in the process of free abrasive grinding.Furthermore,it discusses other methods to achieve uniform grinding of polycrystalline diamond sheets,providing reference for further research and application by scholars.
维普
万方数据