A refined control method for the dynamic stiffness of the floor slab at the equipment placement loca-tion is proposed to address the micro vibration control problem of the coating equipment structure floor slab in the electronic factory building.Firstly,the vibration velocity response and dynamic stiffness of the foundation floor where the coating equipment is located in the built plant are measured and analyzed,and the required dy-namic stiffness of the floor under the allowable vibration standard is determined.Secondly,the dynamic finite el-ement model of the floor structure is established to explore the difference between the structural size of the model and the calculated value of dynamic stiffness.Finally,the design size of floor structure meeting the allow-able vibration standard of coating equipment is obtained through calculation,and verified by engineering.The re-sults show that the maximum vibration velocity amplitude of 1/3 octave frequency range corresponds to the cen-tral frequency point of 40 Hz or 50 Hz under the operation state of coating equipment,and the dynamic stiffness of floor slab is the highest in the frequency range of 35.5～44.7 Hz.
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