摘要
发热体作为单晶炉的唯一热源,是影响拉晶质量的重要部件.通过与传统石墨发热体材料进行对比实验,分别针对电阻率、电阻温度稳定系数、导热系数、力学性能、抗腐蚀性5个重要因素,结合自身的工艺进行比较,探究碳/碳材料作为单晶炉发热体的优劣势.
Abstract
As the only heat source of a single crystal furnace,the heating element is an important component that affects the quality of crystal pulling.By conducting comparative experiments with traditional graphite heating materials,focusing on the five important factors of electrical resistivity,resistance temperature stability coefficient,thermal conductivity,mechanical properties,and corrosion resistance,combined with their own processes,this study explores the advantages and disadvantages of carbon/carbon materials as single crystal furnace heating materials.
维普
万方数据