Experimental Design of Virtual Simulation for Integrated Circuit Process
It is difficult to build a complete IC process line in Colleges and universities,which makes it difficult to carry out process experiments effectively.Under some special circumstances(such as the outbreak of an epidemic),it is difficult to implement the process experiment carried out by the originally established school enterprise and school school cooperation.Aiming at the existing problems,taking the lateral diffusion metal oxide semiconductor(LDMOS)devices widely used in power integrated circuits as an example,the virtual simulation experiment design of integrated circuit process is carried out.Based on the virtual simulation platform of semiconductor process computer aided design(Sentaurus TCAD),the structure design,process design,performance test and other experimental links of LDMOS devices are completed,covering the whole process of integrated circuits from silicon wafer selection to chip forming.
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