Preparation of Ag/Al2 O3/ZnO Composite Film and Its Electromagnetic Shielding Performance
Electromagnetic shielding materials used in military scenarios such as optical windows need to have high electromagnetic shielding performance and light transmittance at the same time.In order to achieve this goal,the composite films were made by magnetron sputtering to deposit silver(Ag),alumina(Al2O3)and zinc oxide(ZnO)and compare the comprehensive properties under different structures.The results show that the composite film alleviates the problem of low light transmittance in visible light caused by high reflection of metal,and maintains good shielding performance and stability.Among them,the 10 nm Ag/25 nm Al2O3/40 nm ZnO composite film has the best comprehensive performance,with a block resistance of 6 Ω/sq,an average light transmittance of 78.66%,an average electromagnetic shielding of 24.49 dB in the 0.01～9 GHz band,and a maximum shielding performance of 57 dB.
magnetron sputteringelectromagnetic shieldinghigh light transmittancemetal and metal oxide composite filmlight transmittance
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