Design of Doubleballbar System Based on Diaphragm Guideway
In order to solve the mechanical coupling problem commonly existing in the parallel reed structure of Double ball bar,an arc-shaped groove diaphragm guideway is designed according to Abb's principle.By enumerating and changing the structural pa-rameters of the membrane guide rail,the Statics characteristics of the membrane guide rail are analyzed using the ANSYS Wrokbench finite element analysis software.It is found that the rigidity ratio of the arc groove flexible membrane with three pairs of holes,a hole span of 110° and a hole width of 5 mm is optimal.At the same time,a high-precision LVDT signal-conditioning circuit is designed based on ADA2200 as the demodulation chip.The results show that within the measurement range of±500um,the estimated stand-ard deviation is±0.66 um,and the detection accuracy reaches 1 um,which can meet the working requirements of Double ball bar.
万方数据
维普
