针对薄膜体声波谐振腔(FBAR)滤波器测试夹具误差校准,提出一种改进的TRL校准方法,将三维电磁仿真和TRL计算结合,用于测试套件(夹具和TRL校准件)的前期设计与优化,确保TRL校准件达到足够精度.由于DUT(device under test,待测器件)参数未知,实测中采用四种不同结构的测试套件,校准前各组测试结果差异较大,但TRL校准后高度吻合,通带内的差异小于 0.2 dB,不但精准确定DUT真实参数,而且表明本TRL校准方法对于不同结构夹具去嵌入的有效性.该仿真计算不仅可以设计高精度测试套件,避免过度依靠实测,并且可与实测相互验证,并可推广到其他微波器件的测量,节省测试成本.
Simulation and testing of TRL calibration for FBAR filter
An improved TRL calibration method is proposed for the error calibration of thin film bulk acoustic resonator(FBAR)filter test fixture,which combines 3-D electromagnetic simulation and TRL calculation for the preliminary design and optimization of the test kit(fixture and TRL cal-kits)to ensure that the TRL cal-kits achieves sufficient accuracy.Because the parameters of the DUT(Device Under Test)are unknown,four test suites with different structures are used in measurements.The test results of each group differ greatly before calibration,but coincide highly after TRL calibration,and differences in the passband are less than 0.2 dB.This not only accurately determines the true parameters of the DUT,but also shows the effectiveness of this TRL calibration method for the de-embedding of fixtures with different structures.The simulation calculation can not only design high-precision test suite to avoid over-reliance on measurements,but also mutually verify with measurements,and can be extended to other microwave devices to save test costs.
NETL
NSTL
万方数据
维普
