首页|A High Precision Software Compensation Algorithm for Silicon Piezoresistive Pressure Sensor

A High Precision Software Compensation Algorithm for Silicon Piezoresistive Pressure Sensor

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There are generally zero drift, sensitivity drift and nonlinear error in silicon piezoresistive pressure sensors due to the inherent characteristics of semiconduc-tor materials. It is necessary to compensate and correct the errors produced so as to meet the requirements of measurement accuracy. In order to further improve the compensation precision, based on the research of various basic software compensation methods, a surface fitting compensation algorithm based on least square method is designed, and the software is implemented on the Visual Basic platform. The experimental results show that the zero drift, sensitivity drift and nonlinear error is effectively eliminated, and the output precision of the sensor is greatly improved.

High precision compensation algorithmLeast square methodSurface fitting

WU Tianshu、CHEN Shuyu、WU Peng、NIE Shaozhong

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College of Computer Science, Chongqing University, Chongqing 400044, China

Chongqing Chuanyi Automation Co., Ltd., Chongqing 401121, China

This work is supported by the National Key R&D Program of ChinaNational High Technology Research and Development Program of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of China

2018YFB20039002012AA0412016127239961572090

2019

10.1049/cje.2019.05.001

中国电子杂志(英文版)

中国电子杂志(英文版)

CSTPCDCSCDSCIEI
ISSN：1022-4653
年,卷(期)：2019.28(4)
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