首页|Research on Measurement Accuracy of the Double-Channel Microwave Power Sensors Based on an MEMS Cantilever Beam

Research on Measurement Accuracy of the Double-Channel Microwave Power Sensors Based on an MEMS Cantilever Beam

扫码查看
原文链接
  • NETL
  • NSTL
  • 万方数据
  • 维普
A thermopile-based microwave power sensor and a double-channel microwave power sensor are compared in order to research the measurement accuracy of microwave power.The relationship of the displacement of MEMS cantilever beam with the measured microwave power is researched,and the reason that the microwave power consumed by the MEMS cantilever cannot be ignored at low power level is explained.The ratio of microwave power consumed by the MEMS cantilever with the microwave frequency is obtained,and the measured results show that the percentage is 51.96％@8GHz,52.31％@10GHz and 55.11％@12GHz on the average,respectively.There is an important reference value to achieve the accurate microwave power measurement of the double-channel microwave power sensors.

Thermopile-based power sensorMEMS cantileverDouble-channelMeasurement accuracy

WANG Debo、WU Lele、LI Longfei、DAI Ruiping

展开 >

Nanjing University of Posts and Telecommunication, Nanjing 210023, China

This work is supported by the National Natural Science Foundation of ChinaProvince Natural Science Foundation of JiangsuOpen Research Fund of Key Laboratory of MEMS of Ministry of Education,Southeast UniversityScientific Research Foundation of Nanjing University of Posts and TelecommunicationsScientific Research Foundation of Nanjing University of Posts and Telecommunications

61704086BK201408903206005302NY215139NY217039

2019

10.1049/cje.2019.06.011

中国电子杂志(英文版)

中国电子杂志(英文版)

CSTPCDCSCDSCIEI
ISSN：1022-4653
年,卷(期)：2019.28(5)
  • 8