Analysis of the Development Status of Single Crystalline Diamond Preparation Technology for Semiconductors Based on Patent Data and Research on Development Strategies in China
Currently,microwave plasma chemical vapor deposition(MPCVD)is the main method for preparing single crystalline diamond for semiconductors,but the preparation of single crystalline diamond still cannot meet the requirements of high performance semiconductor devices in terms of quality and size which limits the industrial application of diamond in the semiconductor field.The MPCVD method to prepare single crystalline diamond is analyzed on basis of patent data,including trend of technological development,regional layout,applicant distribution,direction of technology evolution,and key applicant technology strategies,and to provide relevant suggestions for domestic innovation entities to grasp technology trends,plan research and development directions,and technical layout protection.
NETL
NSTL
万方数据
