Investigation on influence factors of fabricating periodically ordered ZnO nanorod arrays
Periodically ordered ZnO nanorod arrays were fabricated on GaN substrates by polystyrene(PS)nanosphere lithography and subsequent hydrothermal growth to investigate the factors to influence the growth of ZnO nanorod arrays.The periodicity and morphology of ZnO nanorod arrays were diverse by changing the factors such as the sizes of PS nanospheres,the duration of reactive ion etching(RIE),growth temperature,concentration of precursor solution and so on.The XRD results displayed that the ZnO nanorods preferentially grew along the[0001]crystal orientation with good crystalline quality.This work has studied the influence factors of fabricating periodically ordered ZnO nanorod arrays,which provides a relatively low-cost method for the fabrication of ordered nanoarrays of semiconductor materials.
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万方数据
维普
