首页|Femtosecond laser-acoustic modeling and simulation for AICu nanofilm nondestructive testing
Femtosecond laser-acoustic modeling and simulation for AICu nanofilm nondestructive testing
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Photoacoustic detection has shown excellent performance in measuring thickness and detecting defects in metal nanofilms.However,existing research on ultrafast lasers mainly focuses on using picosecond or nanosecond lasers for large-scale material processing and measurement.The theoretical study of femtosecond laser sources for photoacoustic nondestructive testing(NDT)in nanoscale thin film materials receives much less emphasis,leading to a lack of a complete physical model that covers the entire process from excitation to measurement.In this study,we developed a comprehensive physical model that combines the two-temperature model with the acoustic wave generation and detection model.On the basis of the physical model,we established a simulation model to visualize the ultrafast laser-material interaction process.The damage threshold of the laser source is determined,and the effect of key parameters(laser fluence,pulse duration,and wavelength)for AlCu nanofilms on the femtosecond photoacoustic NDT process is discussed using numerical results from the finite element model.The numerical results under certain parameters show good agreement with the experimental results.
femtosecond photoacousticnondestructive testingmetal nanofilmultrafast laser-matter interactionmodeling and simulationsemiconductor manufacturing
Zhongyu WANG、Jing MIN、Jing HU、Zehan WANG、Xiuguo CHEN、Zirong TANG、Shiyuan LIU
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State Key Laboratory of Intelligent Manufacturing Equipment and Technology,Huazhong University of Science and Technology,Wuhan 430074,China
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